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Exhibitors Products Exhibit Profile Application Field Floor Plan

Efab - Aixtron G5 + IC2 5x8''

Industry category：
Lasers Technology & Intelligent Manufacturing
Product range：
Laser Material and Component
Application field：
Semiconductor Processing & Manufacturing
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Configuration: Aixtron G5 + IC2 5x8'' MOCVD system with Horiba MFC's, EpiTT and Penta Injector. Gas Distribution Confirgured as follows: Hydride Lines : NH3 Line x 1 , Cl Line x 1, Dopant Lines : SiH4/H2 with dilution x 1, Cl with dilution x 1 MO Source :TMGa x 2, TMAl x 2, Cp2Mg x 1, Equipped with (4) RM 6S and (1) RM 25S thermal baths

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