Aixtron Filter cartridges CT500/CT1000/CT2000 FILTER PERFORMANCE TABLE Product Name: Particle filters Cotton material: POLYSTER Gasket Material: POLYSTER Support materials: SUS#304 AIR Permeability: 125 cc/cm2/sec.0.52,w.g.(CFM) weight: 520 g/m2 thickish: 0.5 m/m (75~150 um) burstingstrength: 35 kg/cm2 Operation Constant Temperature: 260°C Maximun Operation Temperature: 300°C Resistance to organic solvent: Very Good Resistance to ocid: Good Resistance to oxidize : Very Good